Process and apparatus for forming ball bumps

An apparatus for removing excess small balls, comprising:

• an arrangement baseplate having numerous attraction openings to attract small balls, thereby holding and arranging the small balls on the arrangement baseplate;
• and
• an ultrasonic vibration source for applying an ultrasonic vibration to the arrangement baseplate to remove excess small balls adhered either to the arrangement baseplate or to the small balls held and arranged in the selected positions on the arrangement baseplate, while retaining the small balls attracted to the attraction openings in the selected positions on the arrangement baseplate.

A process of removing excess small balls, comprising:

• applying an ultrasonic vibration to an arrangement baseplate on which numerous small balls are held and arranged in selected positions by being attracted to attraction openings in the arrangement baseplate, to remove excess small balls not attracted to the attraction openings hut adhered either to the arrangement baseplate or to the small balls attracted to the attraction openings, while retaining the small balls attracted to the attraction openings to be held and arranged in the selected positions on the arrangement baseplate.

An apparatus for removing excess small balls, comprising:

• an arrangement baseplate having numerous attraction openings to attract small balls, thereby holding and arranging the small balls on the arrangement baseplate;
• and
• an ultrasonic vibration source for applying an ultrasonic vibration to the arrangement baseplate to remove excess small balls not attracted to the attraction openings but adhered either to the arrangement baseplate or to the small balls attracted to the attraction openings, while retaining the small balls attracted to the attraction openings to be held and arranged in the selected positions on the arrangement baseplate.