Controlled multi-nozzle liquid dispensing system
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYao-Hwan Kao, Chi-Ren Hsieh
Life of this patent
Estimating the term…
Abstract
A flow system that is suitable for controlled dispensing of liquids such as anti-reflection coatings is described. The system is driven by a gas at high pressure from a single dispensing bottle. On emerging from the dispensing bottle the fluid is directed into one of two branches, each such branch being terminated by its own nozzle. By inserting a needle valve in each branch of the flow system, between the branch point and the nozzle, control of the amount of liquid dispensed by each nozzle is separately achieved and a change in flow through one nozzle does not affect the flow through the other nozzle.
Claims14
A liquid dispensing system comprising:
- a dispensing bottle in which a liquid, having a surface, is contained;
- an inlet tube having a first end, external to the dispensing bottle and connected to a source of high pressure, and a second end, internal to the dispensing bottle and located above said surface;
- an outlet tube having a first end, internal to the dispensing bottle and below said surface, and a second end external to the dispensing bottle;
- a seal for the dispensing bottle through which both the inlet and the outlet tube pass;
- a branch tube having a single inlet end and a plurality of outlet ends;
- a leak free connection between the second end of the outlet tube and the inlet end of the branch tube;
- a plurality of needle valves each having an inlet end, connected to an outlet end of the branch tube, and an outlet end;
- and
- a leak free connection between the outlet end of each needle valve and a nozzle suitable for dispensing the liquid.
A method for dispensing a liquid, comprising:
- providing a dispensing bottle and partially filling said bottle with said liquid;
- connecting the dispensing bottle to a gas at a high pressure thereby causing the liquid to flow from the dispensing bottle into an outlet tube, having a plurality of branches that direct the liquid to dispensing nozzles;
- and
- controlling the flow of the liquid through each branch by means of a needle valve in each branch.
Dependencies are inferred from the claim text.