Electronic device comprising an integrated time base
AssigneeCentre Electronique Horloger S.A.
InventorJean Hermann
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Abstract
An electronic device (1) has a substrate (2) of monocrystalline silicon on which is an integrated circuit (3). The integrated circuit is an oscillator containing a resonator, a maintenance circuit to cause the vibration of the resonator, and a frequency division chain. The maintenance circuit as well as the division chain are manufactured as CMOS circuits. The resonator is an integrated resonator (4) formed of a body cut out in a delimited surface part of reduced thickness (14) of the substrate (2), of a thin layer of piezoelectric material (10) deposited on at least a part (6) of the body, and of a thin metallic layer (11) deposited on the piezoelectric layer (10) so as to form an electrode.
Claims6
An integrated electronic device comprising a monocrystalline silicon substrate, and comprising an integrated circuit comprising an oscillator containing a resonator, a maintenance circuit to cause the resonator to vibrate, and a frequency division chain, said maintenance circuit as well as said division chain being manufactured as CMOS circuits, wherein said resonator is an integrated resonator formed of a body cut out in a delimited surface part having a reduced thickness of said substrate, of a thin layer of piezoelectric material deposited on at least a part of said body, and of a thin metallic layer deposited on said piezoelectric layer so as to form an electrode.
Dependencies are inferred from the claim text.