Microelectromechanics-based frequency signature sensor
AssigneeCornell Research Foundation, Inc.
InventorsDan Haronian, Noel C. MacDonald
Life of this patent
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Abstract
An acoustic filter array of microelectromechanical beams each having a characteristic resonance frequency response to mechanical and/or acoustical vibration. The array divides incoming acoustic signals into a plurality of discrete spectral components, each of which may be separately detected and converted into corresponding electrical signals. The acoustic filter may be integrated onto a single crystal silicon substrate with electrical circuity for performing acoustic signal processing functions required for applications such as speech processing and simulating the physiological function of the ear.
Claims27
A microelectromechanical sensor responsive to vibration, comprising:
- an array of microelectromechanical released structural beam elements of different beam characteristics mounted for deflection in response to vibration to be detected, each of said beam elements being acoustically coupled to adjacent ones of said beam elements, and being spaced from adjacent ones of said beam elements by no more than approximately 20 .mu.m;
- and
- a transducer for each beam which generates an output signal in response to the deflection of its corresponding beam element.
A microelectromechanical sensor responsive to vibration, comprising:
- an array of microelectromechanical released structural beam elements of different beam characteristics mounted for deflection in response to vibration to be detected, each said beam element including a first end and a second end each fixed to a substrate, and a central portion released from said substrate for relative motion with respect to the substrate;
- a plurality of tension-adjusting devices for tuning the resonant frequencies of respective beams, said first and second ends of each said beam elements being secured to respective ones of said tension-adjusting devices;
- and
- a transducer for each beam which generates an output signal in response to the deflection of its corresponding beam.
Dependencies are inferred from the claim text.