Single-crystal silicon cantilever with integral in-plane tip for use in atomic force microscope system
AssigneeInternational Business Machines Corporation
InventorRobert Paul Ried
Life of this patent
Estimating the term…
Abstract
A cantilever for use in an atomic force microscope system is formed of single-crystal silicon and has an integral tip. The tip is formed by the convergence of three planes, one of which is one of the two outer generally parallel planes which define the thickness of the cantilever. The tip lies between the cantilever's two thickness-defining planar surfaces and is thus an in-plane integral tip. The cantilever is supported in the AFM system so that it makes an acute angle with the surface of the sample to be scanned. The cantilever can be supported in the AFM system so that the cantilever outer surface that converges to the tip is oriented to either face the sample or face away from the sample.
Claims24
A cantilever formed of single-crystal silicon and having a fixed end, generally parallel top and bottom surfaces, and a length terminated at the free end to form a tip, the tip being integral with the single-crystal silicon forming the cantilever and being the convergence of three planes, a first of said three planes being the top or bottom surface of the cantilever, a second of said three planes other than the top and bottom surfaces of the cantilever being a {111} crystalline plane, and a third of said three planes being a plane generally perpendicular to the top and bottom surfaces of the cantilever.
A cantilever for use in an atomic force microscope system of the type that has a sample holder for holding a sample whose surface is to be scanned, the cantilever being formed of single-crystal silicon and having (a) generally parallel top and bottom surfaces;
- (b) a free end tip for use in scanning the surface of the sample, the tip being integral with the single-crystal silicon forming the cantilever and being the convergence of three planes, a first of said three planes being the top or bottom surface of the cantilever, a second of said three planes other than the top and bottom surfaces being a {111} crystalline plane of the single-crystal silicon, and the third of said three planes being a plane generally perpendicular to the top and bottom surfaces of the cantilever;
- and (c) a fixed end for angled attachment to the atomic force microscope system so that the cantilever forms an acute angle with the surface of the sample when the sample is held in the sample holder.
Dependencies are inferred from the claim text.