US 5,856,561 AGranted

Bisphenol carboxylic acid tertiary ester derivatives and chemically amplified positive resist compositions

AssigneesShin-Etsu Chemical Co., Ltd., Nippon Telegraph and Telephone Corporation

InventorsTakesi Nagata, Satoshi Watanabe, Katsuya Takemura, Tsunehiro Nishi, Shigehiro Nagura, Akinobu Tanaka, Yoshio Kawai

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Abstract

Novel bisphenol carboxylic acid tertiary ester derivatives having two aromatic ether groups and an ester group which are all replaced by acid labile groups are provided. The derivatives are used as a dissolution inhibitor in a chemically amplified positive resist composition comprising an organic solvent, an alkali soluble resin, and a photo-acid generator. Since the dissolution inhibitor has a highly reactive acetal group as an acid labile group, its coupling-off rapidly takes place after exposure. The dissolution inhibitor itself is less alkali soluble and its acid decomposition product is a phenol derivative having a carboxylic acid group with high alkali solubility, leading to a high dissolution contrast.

Claims14

Dependent claims

A bisphenol carboxylic acid tertiary ester compound of the following formula (1):

##STR13## wherein each of R.sup.1 and R.sup.3 is a hydrogen atom, normal or branched alkyl group, normal or branched alkoxy group, or normal or branched alkoxyalkyl group,
R.sup.2 is a normal or branched alkylene group,
R.sup.4 is a tertiary alkyl group,
R.sup.5 is an acetal substituent of the following formula (2):
##STR14## wherein R.sup.6 is a hydrogen atom, normal or branched alkyl group, normal or branched alkoxy group, or normal or branched alkoxyalkyl group, which may contain a carbonyl group in their molecular chain, R.sup.7 is a normal or branched alkyl group, normal or branched alkoxy group, or normal or branched alkoxyalkyl group, which may contain a carbonyl group in their molecular chain, R.sup.8 is a normal or branched alkyl group, or normal or branched alkoxyalkyl group, which may contain a carbonyl group in their molecular chain, and
letter p is an integer of 0 to 5, q is equal to 1 or 2, m and n are integers satisfying m.gtoreq.0, n.gtoreq.1, and m+n.ltoreq.5.

3 more elements

Dependencies are inferred from the claim text.