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US 5,856,521 AGranted
Acrylic or methacrylic acid derivatives and polymers obtained therefrom
AssigneeWako Pure Chemical Industries, Ltd.
InventorsMotoshige Sumino, Kazuhito Fukasawa
Life of this patent
Estimating the term…
Abstract
A monomer of the formula: ##STR1## wherein R5, R6 and R7 are independently hydrogen, alkyl, cyano, alkyloxycarbonyl or carbamoyl; Z is a spacer or a direct link; and R is hydroxyalkyl having a protected terminal hydroxy, can produce a polymer useful for producting a resist composition.
Claims14
A monomer represented by the formula 1!:
- ##STR30## wherein R.sup.5, R.sup.6 and R.sup.7 are independently a hydrogen atom, an alkyl group, a cyano group, an alkyloxycarbonyl group or a carbamoyl group;
- Z is a spacer or a direct link;
- and R is a hydroxyalkyl group having a protected terminal hydroxyl group.
A polymer comprising as constituent units monomer units represented by the formula 1a!:
- ##STR37## wherein R.sup.5, R.sup.6 and R.sup.7 are independently a hydrogen atom, an alkyl group, a cyano group, an alkyloxycarbonyl group or a carbamoyl group;
- Z is a spacer or a direct link;
- and R is a hydroxyalkyl group having a protected terminal hydroxyl group.
Dependencies are inferred from the claim text.