Ionic substance removing material for use in super-clean room
AssigneesTakuma Co., Ltd., NEC Corporation
InventorsKunihiro Sakata, Hiroshi Nonaka, Toshinori Suenaga, Shingo Tokunaga, Susumu Shuutoku, Goro Fujiwara, Mitsunobu Masuda, Shinji Hattori, Naoki Irie
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Abstract
An ionic substance removing material for use in a super-clean room and a method of manufacturing the material are disclosed. The material includes an ion exchanger capable of an ion exchange reaction, a non-ion exchange permeable layer and an anti-dust generation layer. The material is secured by the surface of a concrete wall.
Claims7
A coating member having ionic substance-removing ability for use in coating a concrete wall of a super-clean room, comprising:
- a non-ion exchange permeable layer;
- an ion exchange layer;
- and
- an anti-dust generation layer;
- wherein said non-ion exchange permeable layer, said ion exchange layer and said anti-dust generation layer are laid in the recited order one on another to form a three-layered construction from a surface of the concrete wall.
A coating member having ionic substance-removing ability for use in coating a concrete wall of a super-clean room, comprising:
- a non-ion exchange permeable layer comprising a plaster board;
- an ion exchange layer;
- and
- an anti-dust generation layer;
- wherein said non-ion exchange permeable layer said ion exchange layer and said anti-dust generation layer are laid in the recited order to form a three-layered construction from a surface of the concrete wall.
Dependencies are inferred from the claim text.