Water discharge module for semi-conductor exhaust treatment apparatus
OwnerTsong-Maw Cheninventor
Life of this patent
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Abstract
A water discharge module for semi-conductor exhaust treatment apparatus includes a discharge pipe having a curved pipe body and two orifices respectively connected to a reaction chamber of the module and a bottom end of a posterior filter tank; a water discharge pipe communicating with a central bottom end of the discharge pipe; and two annular nozzles disposed at the two nozzles of the discharge pipe. The nozzles spray water mist inwardly towards the interior of the pipe body. Due to the curved configuration of the pipe body and the nozzles spraying inwardly, there are no dead corners or spots in the pipe body so that exhaust can flow smoothly downwardly and waste water carrying particulates can also flow smoothly downwardly to the water discharge pipe for discharge.
Claims1
A water discharge module for semi-conductor exhaust treatment apparatus, said water discharge module comprising:
- a discharge pipe having a curved pipe body and two orifices at both ends thereof, said two orifices being respectively and sealingly connected to a front reaction chamber of said module and a bottom end of a posterior filter tank;
- a water discharge pipe communicating with a central bottom end of said discharge pipe and two annular nozzles respectively mounted at said two orifices of said discharge pipe;
- whereby said nozzles spray water mist from an outer side to an inner side toward an interior of said discharge pipe so that exhaust will flow smoothly down said discharge pipe, and waste water carrying particulates will not accumulate on an inner wall of said discharge pipe and will flow smoothly downwardly and be discharged via said water discharge pipe.
Dependencies are inferred from the claim text.