Method for the plasma assisted high vacuum physical vapor coating of parts with wear resistant coatings and equipment for carrying out the method
OwnerErich Bergmanninventor
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Abstract
The present invention relates to a novel method for the plasma assisted high vacuum vapor coating of parts with wear resistant coatings where the method comprises at least the process steps heating and conditioning and where the process step conditioning comprises heating. A protective gas is used for the heating. It is circulated at a pressure of at least 0.01 bar. Significant advantages are realized over state of the art methods using radiation heating. The method is preferentially carried out in an apparatus conceived for it, which comprises a blower (3), protective shields (8) and gas flow management sheets(9).
Claims11
Apparatus for the plasma assisted high vacuum vapor coating of parts with wear resistant coatings in a process comprising a conditioning step using heating or cooling, said apparatus providing convective heating or cooling of the parts to be coated in said conditioning step, said apparatus comprising a high vacuum chamber, evaporation sources, holders for holding said parts to be coated, and a means for convectively heating or cooling said parts to be coated with a conditioning gas in the high vacuum chamber.
Dependencies are inferred from the claim text.