Fluidized bed reactor to deposit a material on a surface by chemical vapor deposition, and methods of forming a coated substrate therewith

A fluidized-bed reactor for depositing a coating of a material on the surface of a substrate, comprising:

• (a) a bed zone containing a fluidized bed of particles comprising a reactive coating source material;
• (b) a means for heating the bed zone;
• (c) a first gas inlet for introducing a motive stream of reactive gas into the reactor such that the flow of gas in the reactor is in an upward direction;
• (d) a substrate zone situated above the fluidized bed, in which the substrate to be coated is situated;
• (e) a means for heating the substrate such that the temperature of the substrate is less that the temperature of the bed zone;
• and
• (f) a second gas inlet within the reactor below the substrate zone and above the bed zone, in close proximity to the surface of the substrate to be coated, wherein the inlet introduces a gas jet tangential to the flow of reactive gas.

A fluidized-bed reactor for depositing a coating of a material on a surface of a substrate, comprising:

• (a) a first reaction zone containing a fluidized bed of particles comprising a coating source material;
• (b) a means for heating the bed zone;
• (c) a first gas inlet means for introducing a motive stream of reactive gas into the reactor such that the flow of gas in the reactor is in an upward direction;
• (d) a substrate zone situated above the fluidized bed in which the substrate to be coated is situated;
• (e) a means for heating the substrate such that the temperature of the substrate is greater than the temperature of the bed zone;
• and
• (f) a gas outlet located within the reactor above the bed zone and below the substrate zone, in close proximity to the surface of the substrate to be coated.

A fluidized-bed reactor for depositing a coating of a material on the surface of a substrate, comprising:

• (a) a bed zone containing a fluidized bed of particles comprising a reactive coating source material;
• (b) a means for heating the bed zone;
• (c) a first gas inlet for introducing a motive stream of reactive gas into the reactor such that the flow of gas in the reactor is in an upward direction;
• (d) a substrate zone situated above the fluidized bed, in which the substrate to be coated is situated;
• (e) a means for heating the substrate such that the temperature of the substrate is greater that the temperature of the bed zone;
• and
• (f) a second gas inlet within the reactor below the substrate zone and above the bed zone, in close proximity to the surface of the substrate to be coated, wherein the inlet introduces a gas jet tangential to the flow of reactive gas.