Method and apparatus for controlling the temperature of reaction chamber walls

Apparatus for controlling the temperature of a wall of a reaction chamber provided with a shroud for channeling a coolant stream past said wall, said apparatus comprising:

• an optical pyrometer for sensing the temperature of the wall said optical pyrometer positioned away from said wall and capable of detecting a wavelength of at least 4.8 microns and generating a first signal indicative of said sensed wall temperature;
• a target temperature signal source for furnishing a second signal indicative of a target wall temperature;
• a comparator for accepting said first and second signals and for generating an error signal indicative of the difference between said sensed wall temperature and said target wall temperature;
• and
• an adjustable control valve, being responsive to said error signal, for adjusting the degree of closure of said valve and positioned to control the degree of flow of the coolant stream through said shroud, whereby the temperature of the reaction chamber is made to approach the target temperature.

A method of controlling the temperature of a wall of a reaction chamber comprising the steps of:

• supplying, through an inlet conduit, coolant to a shroud that channels the coolant past a wall of the reaction chamber;
• exhausting, through an outlet conduit, coolant from said shroud after said coolant has flowed past said wall of said reaction chamber;
• measuring a temperature of said wall of said reaction chamber with an optical pyrometer, said optical pyrometer positioned away from said wall and capable of detecting a wavelength of at least 4.8 microns;
• selecting a target temperature;
• and
• adjusting a coolant flow control device such that the flow of coolant past said wall of said reaction chamber is regulated and said measured temperature becomes substantially equivalent to said target temperature.

A method for controlling the temperature of a wall of a reaction chamber provided with a shroud for channeling a coolant stream past said wall, said method comprising the steps of:

• sensing the temperature of the wall with an optical pyrometer, said optical pyrometer positioned away from said wall and capable of detecting a wavelength of at least 4.8 microns;
• generating a first signal indicative of said sensed wall temperature;
• furnishing a second signal indicative of a target wall temperature;
• comparing said first and second signals;
• generating, in response to said comparison, an error signal indicative of the difference between said sensed wall temperature and said target wall temperature;
• and
• adjusting, in response to said error signal, the degree of closure of an adjustable control valve that is positioned to control the degree of flow of the coolant stream through the shroud, whereby the temperature of the reaction chamber is made to approach the target temperature.

Apparatus for controlling the temperature of a wall of a reaction chamber comprising:

• an inlet conduit, connected to a shroud, for carrying a flow of coolant to said shroud, said shroud confining and controlling the coolant flow proximate said reaction chamber;
• an outlet conduit, connected to said shroud, for exhausting said coolant from said shroud;
• a coolant flow control device, located within said inlet conduit, for controlling an amount of coolant that flows into said shroud;
• a thermal couple coupled to said wall of said reaction chamber, said thermal couple shielded from radiation from a lamp used to heat a workpiece in said reaction chamber;
• and
• means for controlling said coolant flow control device in response to the measured temperature such that said measured temperature is altered by altering the coolant flow proximate the reaction chamber until the measured temperature attains a target temperature.

A method of controlling the temperature of a wall of a reaction chamber comprising the steps of:

• supplying, through an inlet conduit, coolant to a shroud that channels the coolant past a wall of the reaction chamber;
• exhausting, through an outlet conduit, coolant from said shroud after said coolant has flowed past said wall of said reaction chamber;
• measuring a temperature of said wall of said reaction chamber with a thermal couple attached to said wall of said reaction chamber, said thermal couple shielded from radiation from a lamp used to heat a workpiece in said reaction chamber;
• selecting a target temperature;
• and
• adjusting a coolant flow control device such that the flow of coolant past said wall of said reaction chamber is regulated and said measured temperature becomes substantially equivalent to said target temperature.

Apparatus for controlling the temperature of a wall of a reaction chamber provided with a shroud for channeling a coolant stream past said wall, said apparatus comprising:

• a thermal couple coupled to said wall of said reaction chamber, said thermal couple shielded from radiation from a lamp used to heat a workpiece in said reaction chamber;
• a target temperature signal source for furnishing a second signal indicative of a target wall temperature;
• a comparator for accepting said first and second signals and for generating an error signal indicative of the difference between said sensed wall temperature and said target wall temperature;
• and
• an adjustable control valve, being responsive to said error signal, for adjusting the degree of closure of said valve and positioned to control the degree of flow of the coolant stream through said shroud, whereby the temperature of the reaction chamber is made to approach the target temperature.

Apparatus for controlling the temperature of a wall of a reaction chamber comprising:

• an inlet conduit, connected to a shroud, for carrying a flow of coolant to said shroud, said shroud confining and controlling the coolant flow proximate said reaction chamber;
• an outlet conduit, connected to said shroud, for exhausting said coolant from said shroud;
• a coolant flow control device, located within said inlet conduit, for controlling an amount of coolant that flows into said shroud;
• an optical pyrometer for measuring a temperature of said wall of said reaction chamber, said optical pyrometer positioned away from said wall and capable of detecting a wavelength in the absorption spectrum of said wall;
• and
• means for controlling said coolant flow control device in response to the measured temperature such that said measured temperature is altered by altering the coolant flow proximate the reaction chamber until the measured temperature attains a target temperature.