Combination cryopump/getter pump and method for regenerating same

A method for regenerating a combination cryopump and getter pump apparatus comprising the steps of:

• coupling an integral combination of a cryopump and a getter pump to a single port of a processing chamber;
• isolating active elements of said cryopump in a cryopump chamber from active elements of said getter pump in a getter chamber;
• and
• regenerating the active elements of at least one of said cryopump and said getter pump.

A vacuum pump assembly comprising:

• cryopump means having a cryopump chamber including a first array cooled to close to the temperature of liquid helium and a second array cooled to close to the temperature of liquid nitrogen, said cryopump means being adapted to be coupled to a port of an evacuable chamber;
• getter pump means having a getter pump chamber, said getter pump means being coupled to said cryopump means, said getter pump means being adapted to be coupled to said port of said evacuable chamber;
• and
• means for coupling said cryopump means and said getter pump means to said port of said evacuable chamber;
• whereby said port of said evacuable chamber may be simultaneously pumped by the combination of said cryopump means and said getter pump means.