US 5,855,056 AGranted

Method for fabricating magnetic heads having varying gap lengths on a common wafer

AssigneeStorage Technology Corporation

InventorJames C. Cates

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Abstract

An improved method for forming a magnetic head which efficiently allows multiple head elements of varying gap length to be located on a common wafer. A multiple gap magnetic head is formed by depositing a first magnetic layer on a wafer such that the first layer extends across all the head element segments Two separate insulating layers are individually deposited over the first layer, with a thin etch stop barrier layer being deposited between the insulation layers over heads which are to have a narrower gap length. The top insulation layer covering the etch stop barrier layer is then removed, and a second magnetic layer deposited over all the head element segments on the wafer. In addition to simplifying the fabrication process, the etch stop layer allows tight processing control to be maintained when creating the different gap lengths.

Claims4

Dependent claims

A method for fabricating magnetic head structures having a plurality of head elements positioned on a common wafer, said method comprising:

depositing a first layer of magnetic material to extend across all of said plurality of head elements and patterning to form a plurality of bottom poles;
depositing a first gap layer of insulating material having a predetermined thickness on top of said first layer;
selectively depositing a barrier layer on top of said first insulating gap layer across at least one but not all of the head elements in which a narrower gap length is desired;
depositing a second gap layer of insulating material on top of said first gap layer and said barrier layer;
removing portions of said second gap layer which cover said barrier layer;
and
depositing a second layer of magnetic material on top of said second gap layer and said barrier layer, and patterning said second magnetic layer to form a plurality of top poles.

4 more elements

Dependencies are inferred from the claim text.