Optical device and light waveguide integrated circuit
AssigneeFujitsu Limited
InventorsTetsuzo Yoshimura, Wataru Sotoyama
Life of this patent
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Abstract
A process for integrating optical devices and optical waveguides which comprises forming a refractive index distribution pattern and/or waveguide pattern on a substrate after mounting an optical device on the substrate.
Claims15
A process for integrating optical devices and optical waveguides which comprises:
- first mounting one or more optical devices on a substrate, and then forming a refractive index distribution pattern and/or waveguide pattern on said substrate, by the steps of coating a material for forming said refractive index distribution pattern and/or waveguide pattern on said substrate and then patterning the material to form said refractive index distribution pattern and/or waveguide pattern, to form an optical coupling path communicating with said one or more optical devices.
A process for integrating optical devices and optical waveguides which comprises forming a split refractive index distribution pattern and/or waveguide sections to form a waveguide pattern on a substrate after mounting an optical device on the substrate, by the steps of coating a material for forming said refractive index distribution pattern and/or waveguide pattern on said substrate and then patterning the material to form said refractive index distribution pattern and/or waveguide pattern, with the operation for said forming divided into two or more steps and wherein at least one section of the waveguide pattern near the boundaries of the split waveguide sections is formed so as to be gradually wider than the other sections.
A process for integrating optical devices and optical waveguides which comprises forming a split refractive index distribution pattern and/or waveguide sections to form a waveguide pattern on a substrate after mounting an optical device on the substrate, with spacing formed at the boundaries of the split refractive index distribution pattern and/or waveguide sections to form the waveguide pattern, after which a photosensitive substance made of a material in which the refractive index or solubility is changed by light exposure, such as a photo-refractive index material or light curing material is applied to the regions which include said spacing, and light of a wavelength to which said photosensitive substance is sensitive is emitted from either or both the refractive index distribution pattern and.or optical waveguide pattern to form an optical coupling path.
A process for integrating optical devices and optical waveguides which comprises:
- first mounting one or more optical devices on a substrate, forming a mask on said substrate, and then forming a waveguide pattern on the substrate, where the waveguide thickness is gradually varied at prescribed locations during formation of a waveguide core layer, the thickness variation produced by forming a film with a vapor phase growth or spray method, to form an optical coupling path communicating with said one or more optical devices.
A process for integrating optical devices and optical waveguides which comprises:
- first mounting one or more optical devices on a substrate, forming a mask on said substrate, and then forming a waveguide pattern on the substrate, where the waveguide thickness is gradually varied at prescribed locations, the thickness variations being first produced in a lower layer of the waveguide core layer with the waveguide core layer formed thereon, the thickness variations produced by forming a film with a vapor phase growth or spray method, to form an optical coupling path communicating with said one or more optical devices.
Dependencies are inferred from the claim text.