Laser illumination system
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Koichiro Tanaka
Life of this patent
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Abstract
The illumination energy of an excimer laser is measured and adjusted to always effect illumination at constant energy. A laser beam output from an optics is reflected by a mirror, and applied to a sample. A beam profiler is disposed behind the mirror to measure the energy of an illumination laser beam. An energy attenuating device disposed between another mirror and the optics is operated based on the measurement value so that the energy of the laser beam applied to the sample is kept constant.
Claims29
A laser illumination system comprising:
- an excimer laser producing a laser light;
- means for irradiating said laser light to an object to be treated, and
- an energy measuring device receiving at least a portion of said laser light,
- wherein said energy measuring device measures an energy distribution of said laser light irradiated to a surface of said object being treated with said laser light.
A laser illumination system comprising:
- an excimer laser producing a laser light;
- and
- an energy measuring device receiving at least a portion of said laser light,
- wherein said laser light is irradiated to a surface with said surface being relatively scanned with said laser light in order that said energy measuring device measures an energy distribution of said laser light on an area of said surface scanned with said laser light, and
- wherein said surface is annealed by the irradiation of said laser light.
A laser illumination system comprising:
- an excimer laser producing a laser light;
- an energy attenuating device receiving at least a portion of said laser light produced by said excimer laser and outputting an attenuated laser light therefrom;
- means for irradiating said attenuated laser light to an object to be treated;
- and
- an energy measuring device receiving at least a portion of said attenuated laser light,
- wherein said energy measuring device measures an energy distribution of said attenuated laser light irradiated to a surface of said object being treated with said laser light.
A laser illumination system comprising:
- an excimer laser producing a laser light;
- an energy attenuating device receiving at least a portion of said laser light produced by said excimer laser and outputting an attenuated laser light therefrom, said energy attenuating device having a means for changing a variable energy attenuation factor of said laser light;
- and
- an energy measuring device receiving at least a portion of said attenuated laser light.
A laser illumination system comprising:
- a laser illumination apparatus including means for generating a laser beam having a cross-sectional area;
- and
- an energy attenuating device receiving at least a portion of said laser beam and outputting an attenuated laser beam therefrom said energy attenuating device having a means for changing an energy attenuation factor of portions of the cross-sectional area of the laser beam.
A laser illumination system comprising:
- a laser illumination apparatus including means for generating a linear laser beam;
- and
- an energy attenuating device receiving at least a portion of said linear laser beam and outputting an attenuated linear laser beam therefrom, said energy attenuating device including a plurality of energy attenuation filters for changing an energy attenuation factor of each portion of the laser beam by changing an angle formed by the energy attenuation filter and the laser beam.
A laser illumination system comprising:
- an excimer laser producing a laser light;
- and
- an energy measuring device receiving at least a portion of said laser light, wherein energy distribution of at least one shot of laser light is measured by said energy measuring device in order to determine an energy distribution of a laser light to be irradiated to a surface subsequent to the measurement of said energy distribution of at least one shot of laser light.
A laser illumination system comprising:
- an excimer laser producing a laser light;
- mirror means for receiving said laser light produced by said excimer laser and for splitting said laser light into a first portion and a second portion, said first portion being irradiated to an object to be treated by said laser light;
- an energy measuring device receiving said second portion of said laser light and measuring an energy distribution of said second portion of said laser light to determine an energy distribution of said first portion of said laser light irradiated to said object.
Dependencies are inferred from the claim text.