RE.sub.x M.sub.1-x Mn.sub.y O.sub..delta. films for microbolometer-based IR focal plane arrays

Abstract

Microbolometers can be made with a thin film composition of matter having a large temperature coefficient of resistance (TCR) as compared to the same material in the bulk form. The composition is a manganite of the formula RE.sub.x M.sub.1-x Mn.sub.y O.sub..delta. where RE is Y and the rare earths such as La, Ce, Pr, Nb, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, and combinations thereof, M is a divalent metal such as Ca, Sr, Ba, Pb, and combinations thereof, x is less than l, y is from about 0.75 to about 1.5, and .delta. is from about 2.5 to about 4.0. The microbolometer is made by applying a thin film of the composition on to a substrate such as SiN.sub.x and annealing the deposited film to remove inhomogeneities and to decrease the defects so as to increase the TCR.

Dependencies are inferred from the claim text.