Alumina sintered bodies and method for producing the same
AssigneeNGK Insulators, Ltd.
InventorShigeki Kato
Life of this patent
Estimating the term…
Abstract
An alumina sintered body containing, as impurities, sodium oxide, potassium oxide, silicon oxide, calcium oxide, ferric oxide and titanium oxide in a total amount in the range from 100 to 10000 ppm, in which a total amount of the sodium oxide and potassium oxide based on the total amount of the impurities is not more than 4 wt. %. In the manufacture of the sintered body, its starting powder is admixed with at least an acid compound to produce metal salts by a reaction of the acid compound with metals contained in the starting powder and the resulting metal salts are removed.
Claims4
An alumina shaped sintered body for a semiconductor-producing apparatus, said body having a relative density of not less than 98.2% and comprising alumina and impurities, said impurities comprising sodium oxide, potassium oxide, silicon oxide, calcium oxide, ferric oxide and titanium oxide in a range from 100 to 10000 ppm, and a total amount of the sodium oxide and potassium oxide based on a total amount of said impurities is not more than 4% by weight.
A method for producing an alumina sintered body comprising alumina and unavoidable impurities, said impurities comprising sodium oxide, potassium oxide, silicon oxide, calcium oxide, ferric oxide and titanium oxide in a total amount ranging from 100 to 10000 ppm, said method comprising the steps of:
- adding an acid compound to starting powder of the sintered body;
- reacting Na and K in the starting powder with the acid compound to produce metal salts;
- and
- heating and sintering the starting powder whereby the metal salts are removed.
Dependencies are inferred from the claim text.