Inorganic seal for encapsulation of an organic layer and method for making the same
AssigneeInternational Business Machines Corporation
InventorsJohn Edward Cronin, Barbara Jean Luther
Life of this patent
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Abstract
An inorganic seal for encapsulation of an organic layer during passivation of an integrated circuit device and method for making the same is disclosed. The seal creates a structure which forms an inorganic to inorganic passivation seal over Reactive Ion Etched (RIE) edges in an all organic planar back end of the line (BEOL) insulator. The edge seal prevents the delamination of the passivation layer from the integrated circuit device or a metallization ring which may lead to subsequent formation of moisture-filled channels and corrosion of the metal lines of the device and the failure of the integrated circuit.
Claims9
A method for passivation of an integrated circuit device, the method steps comprising:
- providing a first layer of an inorganic insulator;
- depositing a layer of an organic insulator over said first layer of said inorganic insulator to form an insulating layer;
- depositing a second layer of an inorganic layer on said layer of an organic insulator;
- etching openings in said first inorganic insulator layer and said organic insulator layer;
- depositing a third layer of an inorganic layer over said etched layers;
- etching said third layer thereby forming an inorganic-to-inorganic seal to seal said organic layer.
A method for moisture-sealing a passivation layer in a semiconductor device, said method comprising the steps of:
- providing a first layer of an inorganic insulator;
- depositing an organic layer over said inorganic insulator;
- depositing a second inorganic layer over the organic layer;
- etching a terminal via pad region and an edge seal channel region using an anisotropic etch in said first inorganic insulator layer and said organic insulator layer;
- depositing a third inorganic layer over said regions;
- and
- etching said third inorganic layer using an anisotropic etchback to form an inorganic seal.
Dependencies are inferred from the claim text.