Method for fabricating color solid-state image sensor
AssigneeLG Semicon Co., Ltd.
InventorsEuy Hyeon Back, Sam Yeoul Kim
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Abstract
A method for fabricating a color solid-state image sensor having a plurality of photoelectric conversion regions includes the steps of respectively forming a magenta color filter layer, a yellow color filter layer, and a cyan color filter layer over three photoelectric conversion regions of the plurality of photoelectric conversion regions; and implanting ions into the magenta and cyan color filter layers, thereby reducing transmittivity of blue composition of light which passes the magenta and cyan color filter layers.
Claims15
A method for fabricating a color solid-state image sensor including a plurality of photoelectric conversion regions comprising the steps of:
- forming a magenta color filter layer, a yellow color filter layer, and a cyan color filter layer over respective photoelectric conversion regions of the plurality of photoelectric conversion regions;
- and
- implanting ions into the magenta and cyan color filter layers to reduce the transmittivity of blue composition of light passing through the magenta and cyan color filter layers.
A method for fabricating a color solid-state image sensor comprising the steps of:
- forming a first planarizing layer on a white and black solid-state image sensor;
- forming a first color filter layer on a predetermined portion of the first planarizing layer;
- forming a second color filter layer on areas of the first planarizing layer where the first color filter layer is not formed;
- implanting ions into the first and second color filter layers to vary the transmittivity of the first and second color filter layers;
- forming a third color filter layer on the second color filter layer;
- and
- forming a second planarizing layer on the first planarizing layer including the first, second and third color filter layers.
A method for fabricating a color solid-state image sensor on a white and black solid-state image sensor having a plurality of photoelectric conversion regions, the method comprising the steps of:
- forming a first color filter layer, a second color filter layer, and a third color filter layer on the white and black solid-state image sensor;
- and
- implanting ions into the first and the second color filter layers to reduce the transmittivity of the blue composition of an incident light passing through the first and the second color filter layers.
Dependencies are inferred from the claim text.