Method for manufacturing planar field effect transistors and planar high electron mobility transistors

Abstract

An apparatus and method of processing a planar HEMT or FET semiconductor device is disclosed. An ohmic metalization is patterned on a semiconductor surface then lifted-off. A plurality of process control monitors are isolated, preferably using a wet etch process. The process control monitors preferably include transmission line patterns (TLMs) and etch field effect transistors The TLMs measure the contact resistance during the ohmic alloy process, and the etch field effect transistors monitor the drain current during the gate-recess step. The ohmic metalizations are then alloyed, and a gate is written using an electron beam. The semiconductor device is isolated, followed by application of an overlay which connects all resulting planar device connecting pads.

Dependencies are inferred from the claim text.