Method of using siloxane polymers
AssigneesGelest, Inc., University of Pennsylvania
InventorsBarry C. Arkles, Donald H. Berry, Lisa Kiernan Figge
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Abstract
Silsesquioxane polymers that are useful for preparing SiO.sub.2 -rich ceramic coatings are obtained as the polymeric reaction products from the hydrolysis and condensation of organosilanes having a .beta.-substituted alkyl group. A preferred silsesquioxane polymer is the polymeric reaction product obtained from .beta.-chloroethyltrichlorosilane. Coating compositions containing such silsesquioxane polymers dissolved in organic solvent may be applied to a substrate and converted to SiO.sub.2 -rich ceramic thin layers by evaporating the solvent and heating the coated substrate at moderate temperatures.
Claims20
A method of forming a SiO.sub.2 -containing ceramic film on a substrate comprising applying a coating containing a siloxane polymer onto a substrate and processing the coated substrate in an atmosphere containing at least 0.5% relative humidity under conditions sufficient to convert the siloxane polymer into a SiO.sub.2 -containing ceramic film,
- wherein the siloxane polymer comprises a polymeric reaction product containing at least about five up to about 75 silanol groups per 100 silicon atoms and obtained from the hydrolysis and condensation polymerization of an organosilane containing a .beta.-substituted alkyl group, the organosilane having the general formula:
- R.sub.n SiX.sub.(4-n)
- where n is 1 or 2;
- X is a halogen selected from the group consisting of chlorine, bromine, fluorine, and iodine, or an alkoxy selected from the group consisting of methoxy, ethoxy and propoxy substituents;
- and R is an alkyl group having at least one but not more than two .beta.-substituents that are electronegative.
Dependencies are inferred from the claim text.