Method for producing a sensor for sensing a temperature and/or a flow

A method for producing a sensor which is used for sensing a temperature or a flow and which comprises a substrate and a structured resistance layer arranged on said substrate, comprising the following method steps:

• a) providing a mixture consisting of a platinum resinate paste and a rhodium resinate paste, wherein the platinum resinate paste contains 12% by weight of platinum, the rest of said platinum resinate paste consisting of a resinate, and the rhodium resinate paste contains 7% by weight of rhodium, the rest of said rhodium resinate paste consisting of a resinate;
• b) printing a layer of the mixture by means of a screen printing process onto said substrate having a layer thickness of approximately 15 .mu.m;
• c) drying the mixture at 80.degree. C. for a period of 10 minutes;
• d) burning in the mixture in a continuous burning-in stove at a temperature of approximately 800.degree. C., whereby the thickness of the platinum-rhodium layer will be reduced;
• e) repeating steps b, c, and d on the same substrate until a desired overall platinum-rhodium layer thickness of 1.3 .mu.m has been obtained;
• and
• f) tempering the substrate with the overall layer thickness of 1.3 .mu.m at a temperature of 1400.degree. C. for a period of three hours so as to adjust the temperature coefficient to 3500 ppcm/.degree.C.