Method for removing hydrides, alkoxides and alkylates out of a gas using cupric hydroxide
AssigneeNipon Sanso Corporation
InventorsYoshiaki Sugimori, Tadaharu Watanabe, Hitoshi Kikuchi, Fumitaka Endo, Shinji Ichimura, Megumi Yoshida, Hiroaki Imai
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Abstract
The present invention relates to a method of removing harmful components selected from the group consisting of volatile inorganic hydrides, volatile inorganic halides and organometallic compounds and a method of detecting the same, apparatus employed according to these methods. The harmful components can be removed by bringing it into contact with a crystalline cupric hydroxide. The harmful components can be detected based on the color change of the copper hydroxide.
Claims6
A method of removing a volatile harmful component selected from the group consisting of hydrides of Si, P, As, B, Se and Ge and alkylates and alkoxides of B, Al, Si, P, Ti, Zn, Ga, Ge, As, Se, Zr, In, Sn and Ta from a gas stream containing the harmful component, which comprises contacting the gas stream with crystalline cupric hydroxide.
Dependencies are inferred from the claim text.