Wafer slice base peeling system
AssigneeTokyo Seimitsu Co., Ltd.
InventorsMasaaki Yasunaga, Takeshi Kagamida
Life of this patent
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Abstract
The hot water is stored in the hot-water tank and kept at the predetermined temperature. The clamp base is provided in the hot water of the hot-water tank for receiving the substrate portion of the wafer and the lifter is arranged for moving the wafer from the upper part of the hot-water tank into the hot water. The clamper is placed at the upper of the clamp base and the substrate portion of the wafer is pushed to the clamp base fixedly and the pusher is arranged at the upper side of the clamp base in the vicinity of the clamper so as to push the slice base of the wafer, whereby the slice base is peeled. The peeling is performed in the hot water, therefore, the temperature of the wafer does not lower while peeling, so that the adhesive can be peeled easily.
Claims3
A wafer slice base peeling system comprising:
- a clamp base for receiving a substrate portion of a wafer;
- a clamper for fixing said substrate portion to said clamp base;
- a pusher arranged near said clamper at a side of a slice base, which is adhered to said substrate portion of said wafer, for pushing said slice base;
- a nozzle placed between said clamper and said pusher and provided with a blow-off opening to a boundary portion between said substrate portion and said slice base;
- and,
- hot air generating means connected with said nozzle for generating hot air at a predetermined temperature.
Dependencies are inferred from the claim text.