Apparatus for drawing single crystals by the czochralski method
AssigneeBalzers und Leybold
InventorsJoachim Aufreiter, Dieter Bruss, Burkhard Altekruger
Life of this patent
Estimating the term…
Abstract
An image of the meniscus ring (21) between the crystal (20) and the melt (4) is formed by optical means (12, 24) on a sensor, the signals of which yield the actual value for the diameter of the crystal. Two optical measuring devices are provided, the optical paths of which are defined by base points on the meniscus ring (21) and two planes which are offset by 90.degree. to each other and which are parallel to the main axis of the crystal and in tangential contact with the meniscus ring (21). The two optical paths are preferably set up to intersect, their intersection being in the viewing window.
Claims8
An apparatus for drawing crystals from a melt by the Czochralski method, said apparatus comprising
- a furnace chamber containing a crucible for holding a melt,
- means for pulling a crystal from the melt along a vertical axis so that a meniscus ring forms between the crystal and the melt,
- first optical viewing means for viewing a first base point on the meniscus ring along first optical path in a plane which is parallel to the vertical axis, said first optical viewing means generating a first image,
- second optical viewing means for viewing a second base point on the meniscus ring along a second optical path in a plane which is parallel to the vertical axis, said second optical viewing means generating a second image, said first and second base points being offset from each other on said meniscus,
- means for generating first and signals based on respective said first and second images,
- means for determining an actual diameter of the crystal based on said first and second signals, and
- means for controlling the actual diameter so that it conforms to a nominal diameter.
Dependencies are inferred from the claim text.