Laser with line narrowing output coupler
AssigneeCymer, Inc.
InventorAlexander I. Ershov
Life of this patent
Estimating the term…
Abstract
A laser having a line-narrowing output coupler. This output coupler reflects a portion of light generated in the gain medium and provides a spectral narrowing of that reflected light. A portion of the line narrowed beam is directed back into the gain medium for further amplification and a portion is transmitted as a part of the laser output. In a preferred embodiment, the laser is line narrowed in the rear as well as by the line narrowing output coupler.
Claims10
A line narrowing output coupler for line narrowing a light beam, defining an output beam direction, from a gain medium of a laser system, said line narrowing output coupler comprising:
- A. a partially reflecting mirror oriented in a plane at an angle of 10 to 80 degrees with a plane perpendicular to said output beam direction, so as to permit a portion of light from said gain medium to pass as a component of an output beam and to reflect a portion of the light from said gain medium,
- B. highly reflecting optic, and
- C. a line narrowing means configured to narrow the spectrum of the light reflected from said partially reflecting mirror and to at least once reflect back to said partially reflecting mirror line narrowed light in a direction such that portions of said line narrowed light is reflected from said partially reflecting mirror back into said gain medium for further amplification and portions of said line narrowed light is transmitted through said partially reflecting mirror, reflected from said totally reflecting optic and then reflected out of said laser system by said partially reflecting mirror as additional components of said output beam.
A narrow band laser system comprising:
- A. a laser chamber defining a rear aperture and a output aperture,
- B. a rear line narrowing means positioned so as to line narrow light from said laser chamber exiting said rear aperture,
- C. a line narrowing output coupler means configured to transmit portions of light form said laser chamber exiting said output aperture out of said laser system as components of an output beam, to line narrow portions of the light from said laser chamber exiting said output aperture, defining front end line narrowed light, and to reflect at least a portion of said front end line narrowed light back into the laser chamber for further amplification and to reflect a portion of said front end line narrowed light out of said laser system as additional components of the output beam.
Dependencies are inferred from the claim text.