Pulse laser with pulse energy trimmer
AssigneeCymer, Inc.
InventorRichard L. Sandstrom
Life of this patent
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Abstract
A pulse laser system for providing precise control of laser pulse energy. A fast pulse energy detector having response time in the nanosecond or sub-nanosecond range provides an electrical signal representing pulse energy to a trigger circuit, which integrates the signal and triggers an electro-optic switch when the integrated signal reaches a predetermined level. The operation of the electro-optic switch trims a portion of the pulse energy so that the resulting pulse energy is maintained at a consistent and desired level. In a preferred embodiment, the electro-optic switch includes a Pockels cell and at least one polarizing beam splitter. In this preferred embodiment, an optical delay line provides additional time for the pulse trimming components to operate.
Claims6
A pulse laser system for providing precise control of energy output of each individual pulse in a series of pulses in a pulse laser beam, said system comprising:
- A. a pulse laser for producing a pulse laser beam;
- B. a fast pulse detector having response times in the nanosecond or sub-nanosecond range and configured to detect a pre-output pulse energy of each individual pulse in a series of pulses and produce for each said individual pulse in said series of pulses, a signal corresponding to the pre-output pulse energy of said individual pulse, said signal defining a pre-output pulse energy measurement for said individual pulse;
- C. an electro optic switch having response times in the nanosecond or sub-nanosecond range for blocking portions of each pulse in said series of pulses;
- and
- D. an electro optic switch trigger configured to control said electro optic switch based on said signals from said fast pulse detector, so as to limit the energy output of each individual pulse to approximately a desired energy output based on the pre-output pulse energy measurement of said individual pulse.
Dependencies are inferred from the claim text.