Cylindrical multiple-pole mass filter with CVD-deposited electrode layers
AssigneeShimadzu Corporation
InventorsMasahiro Hiraishi, Toshihiko Yoshida, Hiroaki Waki, Sunao Yoshida, Shinichi Kuroda
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Abstract
A quadrupole mass filter, or a multiple-pole mass filter in general, composed of a cylindrical main body made of an insulating material and having a star-shaped cross-sectional profile whose inward bulges are curved substantially hyperbolic, and four electrode layers of a high melting point metal deposited by a chemical vapor deposition (CVD) process. The four electrode layers are separated at the outward bulges of the star-shaped cross-sectional profile. The quadrupole mass filter has pre-rod electrodes.
Claims12
A multiple-pole mass filter comprising:
- a cylindrical main body made of an insulating material having a star-shaped cross-sectional profile whose inward bulges are curved substantially hyperbolic;
- and
- an electrode layer of a high melting point metal deposited by a chemical vapor deposition (CVD) process on each of the inward bulges, wherein neighboring electrode layers are separated at an outward bulge of the star-shaped cross-sectional profile between the neighboring electrode layers, each of the electrode layers extending to an outside surface of the main body from an end of the main body for a lead wire to be bonded on the electrode layer.
A multiple-pole mass filter comprising:
- a cylindrical main body made of an insulating material having a star-shaped cross-sectional profile whose inward bulges are curved substantially hyperbolic;
- a main electrode layer of a high melting point metal deposited by a chemical vapor deposition (CVD) process on each of the inward bulges, wherein neighboring electrode layers are separated at an outward bulge of the star-shaped cross-sectional profile between the neighboring electrode layers;
- and
- a pre-rod electrode layer of a high melting point metal, deposited by a same chemical vapor deposition (CVD) process as the main electrode layer on each of the inward bulges, adjacent to and separated from the main electrode layer with a gap in between.
Dependencies are inferred from the claim text.