Micro-processing apparatus and method therefor

A micro-working apparatus for performing micro-processing operations on a workpiece by use of an energy beam, said apparatus comprising:

• a vacuum vessel;
• a workpiece support member for supporting a workpiece in said vacuum vessel, said support member being rotatable about an axis;
• an energy beam source for irradiating an energy beam toward a working position in said vacuum vessel;
• observation means for observing an observation position different from said working position in said vacuum vessel;
• and
• means for rotating said support member about said axis and thereby for moving a workpiece supported on said support member between said working position, whereat said energy beam may perform a micro-working operation on the workpiece, and said observation position, whereat the workpiece may be observed by said observation means.

A micro-working apparatus for performing micro-processing and/or assembling operations on a workpiece or workpieces to be disposed in a working area, said apparatus comprising:

• a working device disposed in a working space surrounding said working area to perform an operation on at least one workpiece to be disposed in said working area;
• at least two observation means for providing magnified real-time images of progress of said operation from respective different fields of view;
• and
• positioning means for adjusting a position of said working device relative to the at least one workpiece, said positioning means comprising a circular guide member for guiding movement of said working device around said working area.