Non-fluid conducting pressure sensor module having non-contaminating body and isolation member
AssigneeNT International, Inc.
InventorsDiane L. Englund, Gerald R. Cucci
Life of this patent
Estimating the term…
Abstract
A non-contaminating pressure transducer module having an isolation member is disclosed. The isolation member isolates a pressure sensor within the transducer module from exposure to fluids flowing through a conduit in the module. The transducer module may be positioned in-line within a fluid flow circuit carrying corrosive materials, wherein the pressure transducer module produces a control signal proportional to either a gauge pressure or an absolute pressure of the fluid flow circuit. The pressure transducer module of the present invention also avoids the introduction of particulate, unwanted ions, or vapors into the flow circuit.
Claims32
A chemically inert pressure transducer module adapted to be connected in-line with a fluid flow circuit, comprising:
- (a) a chemically inert housing having a bore extending through at least a portion of said housing, wherein an inlet end of said bore is connected in-line to the fluid flow circuit, said housing further having a cavity formed within said housing extending from an outer surface of said housing toward the bore of said housing;
- (b) a chemically inert flexible isolation member separating said cavity and said bore, the isolation member having first and second opposed major surfaces, said first major surface being exposed to fluid flowing in the circuit, said second major surface adjacent and adjoining non-fluid conducting means for sensing a pressure within the flow circuit;
- (c) said non-fluid conducting means for sensing a pressure within the flow circuit being isolated from fluid flowing in the circuit;
- (d) means for constraining the isolation member and the non-fluid conducting means for sensing in a fixed position within the cavity of the housing;
- and
- (e) an electronic circuit contained within the cavity of the housing and coupled to the non-fluid conducting means for sensing a pressure within the flow circuit, whereby the electronic circuit produces an electrical signal proportional to the pressure within the bore.
A chemically inert pressure transducer module adapted to be connected in-line within a chemically corrosive ultra high purity fluid flow circuit, comprising:
- (a) a chemically inert housing having a bore extending through at least a portion of said housing, wherein an inlet end of said bore is connected in-line to the fluid flow circuit, said housing further having a cavity formed therein and extending from an outer surface of said housing toward the bore of said housing;
- (b) a non-fluid conducting pressure sensor positioned within said cavity adjacent said bore for sensing a pressure within the fluid flow circuit;
- (c) a chemically inert isolation member separating said cavity and said bore, said isolation member having first and second opposed major surfaces, said first major surface being exposed to fluid flowing in the bore, said second major surface being adjacent to and adjoining the pressure sensor to said isolation member, thereby isolating the pressure sensor from fluid communication with the bore;
- and
- (d) means for producing an electrical signal proportional to the pressure within the bore coupled to said pressure sensor.
A chemically inert pressure transducer module adapted to be connected in-line within a chemically corrosive ultra high purity fluid flow circuit, comprising:
- (a) a chemically inert housing having a bore extending through at least a portion of said housing, wherein an inlet end of said bore is connected in-line to the fluid flow circuit, said housing further having a cavity formed therein and extending from an outer surface of said housing toward the bore of said housing;
- (b) a non-fluid conducting pressure sensor positioned within said cavity adjacent said bore for sensing a pressure within the fluid flow circuit;
- (c) a chemically inert isolation member separating said cavity and said bore, said isolation member having first and second opposed major surfaces, said first major surface being exposed to fluid flowing in the bore, said second major surface being adjacent to and adjoining the pressure sensor, thereby isolating the pressure sensor from fluid communication with the bore;
- (d) a first sealing member to sealably engage said isolation member to said housing;
- and
- (e) a second sealing member to sealably engage said pressure sensor to said housing.
A chemically inert pressure transducer module adapted to be connected in-line with a fluid flow circuit, comprising:
- (a) a housing having a bore extending through at least a portion of said housing, wherein an inlet end of said bore is coupled in-line to a fluid flow circuit, said housing further having a cavity formed therein;
- (b) an isolation member separating the bore and cavity of said housing;
- (c) a non-fluid conducting pressure sensor at least partially contained within the cavity of said housing and in contact with said isolation member;
- and
- (d) means for producing a signal proportionate to a measured pressure within the bore.
Dependencies are inferred from the claim text.