Apparatus with mechanical and electric springs and method for its manufacture

Apparatus for measuring a characteristic of motion comprising a sensor structure including a mass carried from a support structure by a connecting arrangement, said mass arranged to move with respect to said support structure with mass movement being opposed by a mechanical spring force of said connecting arrangement, said mechanical spring force being characterized by a mechanical spring constant,

• means for generating a displacement signal as a function of time which is representative of distance said mass has moved with respect to said support structure in response to force applied to said support structure,
• means responsive to said displacement signal for applying an electromagnetic feedback force as a function of time on said mass in a direction to move said mass to a predetermined position with respect to said support structure, said electromagnetic feedback force being characterized for small amplitudes of said displacement signal by an electric spring constant which is in a direction opposite that of said mechanical spring force,
• said sensor structure characterized by a high value of mechanical spring constant of said connecting arrangement and by an effective spring constant characterized by a small positive difference between said mechanical spring constant and said electric spring constant,
• whereby said sensor structure is characterized by high sensitivity to low frequency forces as compared to sensor structures having no electromagnetic feedback force but with a high mechanicals spring constant, and by a connecting arrangement less susceptible to breaking as compared to a connecting arrangement characterized by a low mechanical spring constant, and
• wherein
• said mass of said sensor structure includes top and bottom conductive surfaces, and
• said apparatus includes top and bottom cover plates carried by said support structure and having conductive surfaces which face respective said top and bottom conductive surfaces of said mass, and
• said means responsive to said displacement signal for applying an electromagnetic feedback force on said mass includes means for applying a voltage difference between said conductive surfaces of said top and bottom cover plates and applying a reference voltage to said top and bottom conductive surfaces of said mass.

Apparatus for measuring a characteristic of motion comprising a sensor structure including a mass carried from a support structure by a connecting arrangement, said mass arranged to move with respect to said support structure with mass movement being opposed by a mechanical spring force of said connecting arrangement, said mechanical spring force being characterized by a mechanical spring constant,

• means for generating a displacement signal as a function of time which is representative of distance said mass has moved with respect to said support structure in response to force applied to said support structure, means responsive to said displacement signal for applying an electromagnetic feedback force as a function of time on said mass in a direction to move said mass to a predetermined position with respect to said support structure, said electromagnetic feedback force being characterized for small amplitudes of said displacement signal by an electric spring constant which is in a direction opposite that of said mechanical spring force,
• said sensor structure characterized by a high value of mechanical spring constant of said connecting arrangement and by an effective spring constant characterized by a small positive difference between said mechanical spring constant and said electric spring constant,
• whereby said sensor structure is characterized by high sensitivity to low frequency forces as compared to sensor structures having no electromagnetic feedback force but with a high mechanical spring constant, and by a connecting arrangement less susceptible to breaking as compared to a connecting arrangement characterized by a low mechanical spring constant, and wherein
• said mass of said sensor structure includes top and bottom conductive surfaces, and
• said apparatus includes top and bottom cover plates carried by said support structure and having conductive surfaces which face respective said top and bottom conductive surfaces of said mass, and
• said means responsive to said displacement signal for applying an electromagnetic feedback force on said mass includes means for applying a voltage difference between said conductive surfaces of said top and bottom cover plates and applying a reference voltage to said top and bottom conductive surfaces of said mass and
• wherein said mass is forced downwardly by a gravity force of magnitude M.multidot.g where M represents the value of said mass and g represents the value of acceleration of said mass of said gravity force, and wherein
• said mass is balanced to be at a position d.sub.o between said top and bottom cover plates by a force f.sub.e (o) according to the relationship ##EQU40## and said electric spring constant is represented by the relationship ##EQU41## where, .epsilon. represents the numerical value of the permittvity of material in space between the conductive surfaces of said mass and said top and bottom cover plates,
• A represents the area of said conductive surface,
• d.sub.o represents the neutral position of said mass between top and bottom cover plates, and
• V.sub.o represents the voltage required to produce an upward force f.sub.e (o) which balances said downward force of gravity M.multidot.g, that is, ##EQU42##

A method for manufacturing apparatus which measures a characteristic of motion comprising the steps of,

• providing a sensor structure including a mass carried from a support structure by a connecting arrangement, said mass arranged to move with respect to said support structure with mass movement being opposed by a mechanical spring force of said connecting arrangement, said mechanical spring force being characterized by a mechanical spring constant,
• providing means for generating a displacement signal as a function of time which is representative of distance said mass has moved with respect to said support structure in response to force applied to said support structure,
• providing means responsive to said displacement signal for applying an electromagnetic feedback force as a function of time on said mass in a direction to move said mass to a predetermined position with respect to said support structure, said electromagnetic feedback force being characterized for small amplitudes of said displacement signal by an electric spring constant which is in a direction opposite that of said mechanical spring force,
• fabricating said sensor structure with a mechanical spring constant K.sub.m representative of a desired mechanical characteristic of said connecting arrangement, and
• providing said electromagnetic feedback force represented by an electric spring constant K.sub.e so that the difference between said mechanical spring constant and said electric spring constant produces a desired characteristic of said apparatus.

A method for manufacturing apparatus which measures a characteristic of motion comprising the steps of,

• providing a sensor structure including a mass carried from a support structure by a connecting arrangement, said mass arranged to move with respect to said support structure with mass movement being opposed by a mechanical spring force of said connecting arrangement, said mechanical spring force being characterized by a mechanical spring constant,
• providing means for generating a displacement signal as a function of time which is representative of distance said mass has moved with respect to said support structure in response to force applied to said support structure,
• providing means responsive to said displacement signal for applying an electromagnetic feedback force as a function of time on said mass in a direction to move said mass to a predetermined position with respect to said support structure, said electromagnetic feedback force being characterized for small amplitudes of said displacement signal by an electric spring constant which is in a direction opposite that of said mechanical spring force
• fabricating said sensor structure with a mechanical spring constant K.sub.m representative of a desired mechanical characteristic of said connecting arrangement, and
• providing said electromagnetic feedback force represented by an electric spring constant K.sub.e so that the difference between said mechanical spring constant and said electric spring constant produces a desired characteristic of said apparatus,
• wherein
• said electromagnetic feedback force is adjusted such that the difference between said mechanical spring constant and said electric spring constant is substantially zero, such that the transfer function of said sensor structure includes a pure integrator.

A method for manufacturing apparatus which measures a characteristic of motion comprising the steps of,

• providing a sensor structure including a mass carried from a support structure by a connecting arrangement, said mass arranaed to move with respect to said support structure with mass movement being opposed by a mechanical spring force of said connecting arrangement, said mechanical spring force being characterized by a mechanical spring constant,
• providing means for generating a displacement signal as a function of time which is representative of distance said mass has moved with respect to said support structure in response to force applied to said support structure,
• providing means responsive to said displacement signal for applying an electromagnetic feedback force as a function of time on said mass in a direction to move said mass to a predetermined position with respect to said support structure, said electromagnetic feedback force being characterized for small amplitudes of said displacement signal by an electric spring constant which is in a direction opposite that of said mechanical spring force,
• fabricating said sensor structure with a mechanical spring constant K.sub.m representative of a desired mechanical characteristic of said connecting arrangement, and
• providing said electromagnetic feedback force represented by an electric spring constant K.sub.e so that the difference between said mechanical spring constant and said electric spring constant produces a desired characteristic of said apparatus,
• wherein
• said steps of providing means for generating a displacement signal and means for applying a feedback force on said mass includes the step of providing a controller means for applying a reference electric field across said mass during a sensing phase of an operating cycle and for applying a forcing electric field across said mass during a forcing phase of said operating cycle, and
• said step of providing said electromagnetic feedback force represented by an electric spring constant K.sub.e as the sum of an equivalent spring constant during said sensing phase weighted by a duty factor representative of the time that the sensing phase occurs in said cycle and an equivalent spring constant during said forcing phase weighted by a duty factor representative of the time that the forcing phase occurs in said cycle.

A method for manufacturing apparatus for measuring a characteristic of motion comprising the steps of

• providing a sensor structure including a mass carried from a support structure by a connecting arrangement, said mass arranged to move with respect to said support structure with mass movement being opposed by a mechanical spring force of said connecting arrangement, said mechanical spring force being characterized by a mechanical spring constant,
• providing means for generating a displacement signal as a function of time which is representative of distance said mass has moved with respect to said support structure in response to force applied to said support structure,
• providing means responsive to said displacement signal for applying an electromagnetic feedback force as a function of time on said mass in a direction to move said mass to a predetermined position with respect to said support structure, said electromagnetic feedback force being characterized for small amplitudes of said displacement signal by an electric spring constant which is in a direction opposite that of said mechanical spring force,
• providing said electromagnetic feedback force represented by an electric spring constant K.sub.e,
• determining an effective spring constant
• K.sub.eff =K.sub.m -K.sub.e
• where K.sub.m represents the mechanical spring constant of said connecting arrangement such that a desired characteristic of said sense structure as a function of K.sub.eff results, and
• providing said connecting arrangement with a mechanical spring constant of K.sub.m =K.sub.f +K.sub.e.