Glass material variable in volume by irradiation with ultraviolet light
AssigneeAgency of Industrial Science and Technology
InventorsJunji Nishii, Hiroshi Yamanaka
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Abstract
A glass material variable in volume by irradiation with ultraviolet light has a GeO.sub.2 --SiO.sub.2 glass composition having a GeO.sub.2 content of 0.5 to 90 mol %, and is in the form of a thin film formed in an argon atmosphere or in an argon-oxygen mixed gas atmosphere by the high-frequency sputtering method.
Claims4
A glass material expansible in volume by irradiation thereof with ultraviolet light, said glass material being reducible in refractive index by irradiation thereof with ultraviolet light, said glass material having a GeO.sub.2 --SiO.sub.2 glass composition having a GeO.sub.2 content of 0.5 to 90 mol %, and is in the form of a thin film formed on a substrate in an argon-oxygen mixed gas atmosphere having an oxygen content of at most 10 vol % by a high-frequency sputtering method, said ultraviolet light having a wavelength of at most 400 nm.
Dependencies are inferred from the claim text.