Antisoiling coatings for antireflective surfaces and methods of preparation

An antireflective article comprising a substrate having an antireflective surface and an antisoiling coating deposited thereon;

• wherein the antisoiling coating comprises a fluorinated siloxane base film of an approximately monolayer thickness on which is adsorbed oligomeric fluorinated siloxane material in an amount that does not substantially change the antireflective characteristics of the antireflective article;
• wherein the fluorinated siloxane is prepared by applying a coating composition comprising a fluorinated silane of the following formula:
• R.sub.f --R.sup.1 --SiX.sub.3-x R.sup.2.sub.x
• wherein:
• R.sub.f is a perfluorinated group optionally containing one or more heteroatoms;
• R.sup.1 is a divalent alkylene group, arylene group, or mixture thereof, substituted with one or more heteroatoms or functional groups, containing about 2 to about 16 carbon atoms;
• R.sup.2 is a lower alkyl group;
• X is a halide, a lower alkoxy group, or an acyloxy group;
• and
• x is 0 or 1.

A method of applying an antisoiling coating to a substrate having an antireflective surface, the method comprising treating the antireflective surface with a coating composition comprising a fluorinated silane without subsequent processing;

• wherein the fluorinated silane has the following formula:
• R.sub.f --R.sup.1 --SiX.sub.3-x R.sup.2.sub.x
• wherein:
• R.sub.f is a perfluorinated group optionally containing one or more heteroatoms;
• R.sup.1 is a divalent alkylene group, arylene group, or mixture thereof, substituted with one or more heteroatoms or functional groups, containing about 2 to about 16 carbon atoms;
• R.sup.2 is a lower alkyl group;
• X is a halide, a lower alkoxy group, or an acyloxy group;
• and
• x is 0 or 1.

A method of applying an antisoiling coating to a substrate having an antireflective surface, the method consisting essentially of treating the antireflective surface with a coating composition comprising less than about 0.5 weight percent of a fluorinated silane for less than 30 minutes;

• wherein the fluorinated silane has the following formula:
• R.sub.f --R.sup.1 --SiX.sub.3-x R.sup.2.sub.x
• wherein:
• R.sub.f is a perfluorinated group optionally containing one or more heteroatoms;
• R.sup.1 is a divalent alkylene group, arylene group, or mixture thereof, substituted with one or more heteroatoms or functional groups, containing about 2 to about 16 carbon atoms;
• R.sup.2 is a lower alkyl group;
• X is a halide, a lower alkoxy group, or an acyloxy group;
• and
• x is 0 or 1.

A method of applying an antisoiling coating to a substrate having an antireflective surface, the method comprising immersing the substrate in a coating composition comprising a fluorinated silane of the following formula:

• R.sub.f --R.sup.1 --SiX.sub.3-x R.sup.2.sub.x
• wherein:
• R.sub.f is a perfluorinated group optionally containing one or more heteroatoms;
• R.sup.1 is a divalent alkylene group, arylene group, or mixture thereof, substituted with one or more heteroatoms or functional groups, containing about 2 to about 16 carbon atoms;
• R.sup.2 is a lower alkyl group;
• X is a halide, a lower alkoxy group, or an acyloxy group;
• and
• x is 0 or 1;
• wherein the antisoiling coating formed has a thickness of less than about 100 Angstroms.

A method of applying an antisoiling coating to a substrate having an antireflective surface, the method comprising immersing the substrate in a coating composition comprising a fluorinated silane of the following formula:

• R.sub.f --R.sup.1 --SiX.sub.3-x R.sup.2.sub.x
• wherein:
• R.sub.f is a perfluorinated group optionally containing one or more heteroatoms;
• R.sup.1 is a divalent alkylene group, arylene group, or mixture thereof, substituted with one or more heteroatoms or functional groups, containing about 2 to about 16 carbon atoms;
• R.sup.2 is a lower alkyl group;
• X is a halide, a lower alkoxy group, or an acyloxy group;
• and
• x is 0 or 1;
• wherein the antisoiling coating comprises a fluorinated siloxane base film of an approximately monolayer thickness on which is adsorbed oligomeric fluorinated siloxane material in an amount that does not substantially change the antireflective characteristics of the antireflective article.

A method of applying an antisoiling coating to a substrate having an antireflective surface, the method comprises immersing the substrate in a coating composition comprising less than about 0.5 weight percent of a fluorinated silane for less than about 5 minutes without subsequent processing;

• wherein the fluorinated silane is of the following formula:
• R.sub.f --R.sup.1 --SiX.sub.3-x R.sup.2.sub.x
• wherein:
• R.sub.f is a perfluorinated group optionally containing one or more heteroatoms;
• R.sup.1 is a divalent alkylene group, arylene group, or mixture thereof, substituted with one or more heteroatoms or functional groups, containing about 2 to about 16 carbon atoms;
• R.sup.2 is a lower alkyl group;
• X is a halide, a lower alkoxy group, or an acyloxy group;
• and
• x is 0 or 1;
• wherein the antisoiling coating formed has a thickness of less than about 100 Angstroms and comprises a fluorinated siloxane base film of an approximately monolayer thickness on which is adsorbed oligomeric fluorinated siloxane material in an amount that does not substantially change the antireflective characteristics of the antireflective article.