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AssigneesThe Regents of the University of California, IBM Corporation
InventorsKyriakos Komvopoulos, Ian G. Brown, Bo Wei, Simone Anders, Andre Anders, C. Singh Bhatia
Estimating the term…
A process for producing an article with improved ceramic surface properties including providing an article having a ceramic surface, and placing the article onto a conductive substrate holder in a hermetic enclosure. Thereafter a low pressure ambient is provided in the hermetic enclosure. A plasma including ions of solid materials is produced the ceramic surface of the article being at least partially immersed in a macroparticle free region of the plasma. While the article is immersed in the macroparticle free region, a bias of the substrate holder is biased between a low voltage at which material from the plasma condenses on the surface of the article and a high negative voltage at which ions from the plasma are implanted into the article.
A process for producing an article with improved ceramic surface properties, comprising the steps of:
Dependencies are inferred from the claim text.