Gas delivery systems for particle beam processing
AssigneeMicrion Corporation
InventorsRobert A. Casella, Charles J. Libby, Gary P. Rathmell
Life of this patent
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Abstract
Apparatus and method of an improved gas delivery system for delivering reactant material to a workpiece, such as a substrate, being operated on by a particle beam employs a shroud-type concentrator having an interior axial passage. Fluid reactant material is supplied to the axial passage for delivery to the workpiece. A particle beam can traverse the axial passage for impingement on the workpiece surface, concurrently if desired with the reactant delivery.
Claims20
A fluid delivery system for delivering fluid material to a surface of a substrate, comprising
- an extension arm having a distal portion,
- a concentrator having an interior chamber extending between an upper aperture and a lower aperture for forming an axial fluid passage extending therethrough, and connected laterally, relative to said passage, to said distal portion of said arm, said axial fluid passage being open for passing a beam of particles therethrough, and
- fluid delivery means for coupling said interior chamber to a source of fluid material to provide fluid to said interior chamber for forming a fluid delivery path to a substrate surface.
A fluid delivery system for delivering fluid material to a surface of a substrate, comprising
- an extension arm having a distal portion,
- a concentrator having an interior chamber extending between an upper aperture and a lower aperture for forming an axial fluid passage extending therethrough, and connected laterally, relative to said passage, to said distal portion of said arm,
- fluid delivery means for coupling said interior chamber to a source of fluid material to provide fluid to said interior chamber for forming a fluid delivery path to a substrate surface, and
- wherein said concentrator includes a lower portion forming said lower aperture and dimensionally adapted for insertion into a recess of a substrate device for providing fluid within the recess.
A fluid delivery system for delivering fluid material to a surface of a substrate, comprising
- an extension arm having a distal portion,
- a concentrator having an interior chamber extending between an upper aperture and a lower aperture for forming an axial fluid passage extending therethrough, and connected laterally, relative to said passage, to said distal portion of said arm,
- wherein said lower aperture diameter is about 50% larger than said upper aperture diameter, and
- fluid delivery means for coupling said interior chamber to a source of fluid material to provide fluid to said interior chamber for forming a fluid delivery path to a substrate surface.
A fluid delivery system for delivering fluid material to a surface of a substrate, comprising
- an extension arm having a distal portion.
- a concentrator having an interior chamber extending between an upper aperture and a lower aperture for forming an axial fluid passage extending therethrough, and connected laterally, relative to said passage, to said distal portion of said arm,
- wherein said concentrator interior chamber has a fluid-transitioning flare, with a greatest cross-section at said lower aperture, and
- fluid delivery means for coupling said interior chamber to a source of fluid material to provide fluid to said interior chamber for forming a fluid delivery path to a substrate surface.
A fluid delivery system for delivering fluid material to a surface of a substrate, comprising
- fluid providing means for providing fluid material at the surface of the substrate and having a funnel-shaped interior chamber extending between a smaller upper aperture and a larger lower aperture for forming an axial fluid passage extending therethrough,
- positioning means for disposing said fluid providing means with said lower aperture proximate said substrate surface, and
- fluid delivery means for coupling said interior chamber to a source of fluid material to provide fluid to said interior chamber for forming a fluid delivery path to the substrate surface.
A method for delivering fluid material to a recessed surface of a substrate, said method comprising the steps of
- providing an extension arm having a distal portion, and a concentrator connected at said distal arm portion and having a lower portion dimensionally adapted for abutting the recessed surface, said concentrator having an interior axial chamber connected to a source of fluid material, and extending between an upper aperture and a lower aperture formed in said lower portion, said interior axial chamber being open for passing a beam of particles therethrough,
- disposing said concentrator lower aperture proximate to a recessed surface of the substrate, and
- delivering fluid to said interior chamber to provide a flow of fluid material from said concentrator lower aperture to the substrate surface.
A method for delivering fluid material to a recessed surface of a substrate, said method comprising the steps of
- providing an extension arm having a distal portion, and a concentrator connected at said distal arm portion and having a lower portion dimensionally adapted for abutting the recessed surface, said concentrator having an interior axial chamber connected to a source of fluid material, and extending between an upper aperture and a lower aperture formed in said lower portion,
- providing said concentrator with an open volume a smallest cross section proximate the upper aperture, a largest cross section proximate the lower aperture and a tapered portion between the upper aperture and the lower aperture,
- disposing said concentrator lower aperture proximate to a recessed surface of the substrate, and
- delivering fluid to said interior chamber to provide a flow of fluid material from said concentrator lower aperture to the substrate surface.
Dependencies are inferred from the claim text.