Adhering metal to glass
AssigneeCorning Incorporated
InventorsKay M. Belscher, LeRoy R. Morse, Fumio Okamoto, B. Jean Sterlace
Life of this patent
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Abstract
A method of improving adherence of a metal film deposited directly on a silicate glass substrate for a display panel. The method comprises chemically treating the surface of the glass to alter its surface characteristics and thereby improve adhesion robustness of the metal film to the glass surface.
Claims21
A method of improving adherence of a metal film deposited directly on a silicate glass substrate for a display panel, comprising:
- exposing the silicate glass substrate to an acid solution containing fluorine containing-ions in an amount sufficient to increase the adhesion of metal to be deposited without visibly affecting the transmissive quality of the glass substrate;
- and
- sputter depositing the metal film on the surface of the silicate glass substrate.
A nonmechanically abrading method for improving adherence of sputter deposited metal films on glass substrates for display panel applications, comprising:
- exposing a silicate glass panel substrate for a flat panel display device to a acid solution containing fluorine and having a pH between 1 and 6 such that the adherence of a metal film to be deposited on the surface of the silicate glass panel is enhanced, while resulting in a RMS surface roughness, after said exposing step, which is less than about 0.04 microns;
- directly thereafter sputter depositing the metal film on the exposed surface of the silicate glass panel;
- and
- patterning the metal film to form a thin film transistor for a flat panel display.
A method of making metal coated glass for use in information display applications, comprising:
- exposing a glass substrate to a mixture of a fluorine containing compound and at least one acid selected from the group consisting of citric, acetic and phosphoric acid, said acid mixture is sufficient to increase the adhesion of metal to be deposited without visibly affecting the transmissive quality of the glass substrate;
- depositing a metal oxide layer having a thickness between about 50 and 500 angstroms directly on said glass;
- and
- sputter depositing a metal over said metal oxide.
Dependencies are inferred from the claim text.