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US 5,851,363 AGranted
Multilayer film materials system
AssigneeJohnson Matthey Public Limited Company
InventorsJoseph Miller, Derek P A Pearson, Philip G Pitcher
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Abstract
Pt/Co multilayer materials systems having a thin metal interlayer possess superior room temperature coercivity, a square polar Kerr hysteresis loop, sufficient polar Kerr rotation, and are suitable for magneto-optical recording. These material systems allow the reading and writing of information from the substrate side of the multilayer film.
Claims22
A process for the manufacture of metal multilayer films having perpendicular magnetic anistropy comprising:
- i. sputter depositing onto a substrate a metal interlayer
- ii. hyperthermal processing of the substrate and the metal interlayer, said hyperthermal processing comprising energetic particle bombardment, up to and including 265 eV;
- and
- iii. sputter depositing onto the metal interlayer a multilayer.
1 more element
Dependencies are inferred from the claim text.