US 5,851,041 A · Wafer holder with spindle assembly and wafer holder actuator

Abstract

An improved wafer holder with spindle assembly and wafer holder actuator is disclosed. In one embodiment, the vertical motion of a shaft drives an arm positioning member in a rotational motion. The arm positioning member is coupled to a first position of an arm such that the arm moves in a horizontal motion when the arm positioning member rotates. A substrate holding member is coupled to the arm at a second position, such that the horizontal motion of the arm moves the substrate holding member between an open and a closed position. The shaft of the above described embodiment is moved in a vertical motion by an actuator. A first cylinder of the actuator expands and engages a spring which moves the shaft upward and a second cylinder of the actuator retracts to disengage the first cylinder thereby moving the shaft downward.

Claims34

Dependent claims

A substrate holder comprising:

a shaft, wherein said shaft moves in a vertical motion;
an arm positioning member coupled to said shaft, wherein said arm positioning member moves in a rotational motion when said shaft moves in said vertical motion;
an arm coupled to said arm positioning member at a first position of said arm, wherein said arm moves in a substantially horizontal motion when said arm positioning member moves in said rotational motion;
a substrate holding member coupled to said arm at a second position of said arm, wherein said horizontal motion of said arm moves said substrate holding member between an open and a closed position;
and
an actuator coupled to said shaft, wherein said actuator moves said shaft in said vertical motion, and wherein said actuator comprises:
a first cylinder, said first cylinder engaging a spring;
and
a second cylinder, said second cylinder disengaging said first cylinder from said spring.

6 more elements

A substrate holder and actuator assembly comprising:

said substrate holder having:
a spindle, said spindle rotatable about an axis;
a shaft, wherein one of said spindle and said shaft is disposed within the other of said spindle and said shaft;
an arm positioning member coupled to said shaft;
an arm coupled to said arm positioning member at a first position of said arm;
a substrate holding member coupled to said arm at a second position of said arm;
said actuator assembly having:
a spring;
a first cylinder, said first cylinder engaging said spring when said first cylinder is expanded, said spring engaging said shaft of said substrate holder, wherein said spring pushes said shaft in an upward vertical motion, wherein the upward vertical motion of said shaft causes said arm positioning member of said substrate holder to rotate, the rotational motion of said arm positioning member translating into outward horizontal motion of said arm, thereby placing said substrate holder in a closed position;
and
a second cylinder, said second cylinder disengaging said first cylinder from said spring when said second cylinder is retracted, wherein said spring decompresses allowing said shaft to move in a downward vertical motion, wherein the downward vertical motion of said shaft causes said arm positioning member of said substrate holder to rotate, the rotational motion of said arm positioning member translating into an inward horizontal motion of said arm, thereby placing said substrate holder in an open position.

8 more elements

Dependencies are inferred from the claim text.

Wafer holder with spindle assembly and wafer holder actuator

Life of this patent

Wafer holder with spindle assembly and wafer holder actuator

Life of this patent

Abstract

Claims34