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US 5,850,280 AGranted
Stage unit, drive table, and scanning exposure and apparatus using same
AssigneeNikon Corporation
InventorsToshiya Ohtomo, Hiroto Horikawa
Life of this patent
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AssigneeNikon Corporation
InventorsToshiya Ohtomo, Hiroto Horikawa
Estimating the term…
It is an object of the present invention to reduce the weight of a stage unit and suppress heat generation of the driving unit of the stage, thereby improving the surface accuracy of the stage or measurement precision of an interferometer for measuring the position of the stage. A reticle base, a scanning stage mounted on the reticle stage and moved in the scanning direction, and a fine adjustment stage mounted on the scanning stage and capable of being finely moved in the X and Y directions and in the rotational direction are provided as a reticle stage. A first electromagnetic actuator for performing driving in the scanning direction, and a second electromagnetic actuator, having a smaller thrust than that of the first electromagnetic actuator, for performing driving in a direction perpendicular to the scanning direction are provided as the driving unit of the fine adjustment stage.
A stage driving method for driving, in a first direction, a first stage which is arranged to be movable linearly and for driving a second stage arranged to be movable in said first direction and in a second direction perpendicular to said first direction with respect to said first stage, comprising:
A stage driving method for scanning an object of scanning to be scanned which includes at least one of a mask and a photosensitive substrate, said method being used for a scanning exposure apparatus which illuminates said mask on which a transfer pattern is formed and scans said mask in a predetermined scanning direction and synchronously scans said substrate in a direction corresponding to said scanning direction, thereby exposing said pattern on said mask onto said substrate, comprising:
Dependencies are inferred from the claim text.