Ion lens assembly for gas analysis system
AssigneeLeybold Inficon, Inc.
InventorDavid H. Holkeboer
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AssigneeLeybold Inficon, Inc.
InventorDavid H. Holkeboer
Estimating the term…
A miniaturized ion source for a mass spectrometer includes a anode and a focus plate whose interior surfaces form an ionization volume for a retained gas sample. Molecules of the gas sample are ionized by electrons, and the resulting ions are concentrated and converged through an exit aperture in the focus plate to the entrance of an ion analyzer, such as a quadrupole mass filter. Preferably, at least one of the anode and the focus plate includes a curved interior surface which converges the formed ions into a focused beam for directing into the ion analyzer. In addition, the thickness of the exit aperture of the focus plate and or the setback of the focus plate relative to the anode ensures that no line of sight exists between the interior surface of the anode from which ion-forming electrons can scatter into the adjacent ion analyzer.
An ion source for a mass spectrometer, said mass spectrometer further including ion analyzing means disposed adjacent said ion source, said ion source comprising:
An ion source for a mass spectrometer, comprising:
An ion lens assembly, consisting of:
Dependencies are inferred from the claim text.