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AssigneeTRW Inc.
InventorsRandy Wayne Simon, Christine Elizabeth Platt, Alfred Euinam Lee, Gregory Steven Lee
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A lanthanum aluminate (LaAlO.sub.3) substrate on which thin films of layered perovskite copper oxide superconductors are formed. Lanthanum aluminate, with a pseudo-cubic perovskite crystal structure, has a crystal structure and lattice constant that closely match the crystal structures and lattice constants of the layered perovskite superconductors. Therefore, it promotes epitaxial film growth of the superconductors, with the crystals being oriented in the proper direction for good superconductive electrical properties, such as a high critical current density. In addition, LaAlO.sub.3 has good high frequency properties, such as a low loss tangent and low dielectric constant at superconductive temperatures. Finally, lanthanum aluminate does not significantly interact with the superconductors. Lanthanum aluminate can also be used to form thin insulating films between the superconductor layers, which allows for the fabrication of a wide variety of superconductor circuit elements.
A method of fabricating a superconductor coplanar waveguide comprising the step of:
A method of fabricating a superconductor coplanar waveguide comprising the step of:
A method of fabricating a superconductor coplanar waveguide comprising the steps of:
A method of fabricating a superconductor coplanar waveguide comprising the steps of:
A method of forming a superconductor coplanar waveguide comprising the step of forming a superconductor film on a lanthanum aluminate substrate, the superconductor film comprising copper and oxygen.
A method of forming a superconductor coplanar waveguide, the coplanar waveguide having a conductor between walls, the method comprising the step of forming first, second, and third superconductor films on a lanthanum aluminate substrate, the first film being disposed between the second and third films and the first film forming the conductor of the coplanar waveguide, and the second and third superconductor films forming the walls of the coplanar waveguide.
In a method of fabricating a superconductor coplanar waveguide in which at least one superconductor film is deposited on a substrate, the improvement being the substrate comprises lanthanum aluminate.
In a method of fabricating a superconductor coplanar waveguide in which at least one superconductor film is deposited on a substrate, the improvement being the substrate consists essentially of lanthanum aluminate having a crystalline structure and a lattice constant that substantially match the crystalline structure and the lattice constant of the superconductor film, and wherein the crystalline structures are substantially oriented to one another, and there is substantially no chemical interaction between the superconductor film and the substrate.
Dependencies are inferred from the claim text.