Method of making multilayer electrophotographic elements

A method of reducing dark decay in an electrophotographic process comprising the steps of:

• a) charging a photoconductive element in the dark, said photoconductive element comprising an electrically conductive base, two or more charge generation layers, at least one charge transport layer, and a protective layer comprising diamond-like carbon having a fluorine content between 0 and 65 atomic percent of the protective layer;
• b) exposing said photoconductive element to image-wise radiation to form an electrostatic latent image charge pattern on said protective layer;
• c) moving said photoconductive element through a development zone;
• and
• d) transporting electrophotographic developer into a development station, through said development zone in contacting developing relation with the electrostatic latent image charge pattern.