Coupling structure for waveguide connection and process for forming the same

Abstract

A simplified, suitable-to-mass-production and high-reliable coupling structure for connection between optical waveguides or between an optical waveguide and an optical fiber is provided. A tenon is formed at the end of a substrate on which an optical waveguide is formed and a groove is formed on the end portion of another substrate on which an optical waveguide is formed. These optical waveguides are connected by fitting the tenon into the groove. By placing an optical fiber instead of an optical waveguide on the grooved substrate, an optical waveguide and an optical fiber can be connected. The tenon and the groove are formed in good mass-production at a high precision by working silicon substrates by performing chemical anisotropic etching using a mask pattern formed at the end portion of each substrate.

Dependencies are inferred from the claim text.