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US 5,849,108 AGranted
Photovoltaic element with zno layer having increasing fluorine content in layer thickness direction
AssigneeCanon Kabushiki Kaisha
InventorsToshimitsu Kariya, Keishi Saito
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Abstract
A photovoltaic element has a substrate with a conductive surface, a zinc oxide layer containing fluorine and a non-single-crystal semiconductor layer, where the fluorine content of the zinc oxide layer (i) varies across the thickness of the layer, (ii) is at a minimum at the interface with the substrate and (iii) increases toward the semiconductor layer.
Claims16
A photovoltaic element comprising:
- (a) a substrate with a conductive surface;
- (b) a zinc oxide layer containing fluorine;
- and
- (c) a non-single-crystal semiconductor layer stacked in this sequence,
- wherein the fluorine content in said zinc layer (i) varies in the layer thickness direction, (ii) has a minimum at the interface with said substrate and (iii) increases toward said non-single-crystal semiconductor layer.
2 more elements
A photovoltaic element comprising:
- (a) a substrate with a conductive surface;
- and
- (b) an n-type amorphous semiconductor layer stacked on a fluorine-containing zinc oxide layers;
- wherein the fluorine content in said zinc oxide layer (i) varies in the layer thickness direction, (ii) has a minimum at the interface with said substrate and (iii) increases toward said n-type amorphous semiconductor layer.
1 more element
Dependencies are inferred from the claim text.