Method for cleaning wheels of car for semiconductor device manufacturing
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsNick Chang, Chung-Yea Lee
Life of this patent
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Abstract
A method for cleaning the wheels of a car used in a semiconductor manufacturing plant uses a pair of endless belts that carry a dust trapping material on their outer surfaces. The car is located with a wheel supported by two rollers that each carry one of the belts. One of the rollers is turned and as the wheel rides in a gap between the two belts it turns with the first belt and transfers a turning motion to the other belt. As the wheel turns with the belts, dust on the wheel is transferred to the belts.
Claims3
A method for cleaning a wheel of a vehicle that is used in a semiconductor manufacturing plant, comprising the following steps:
- propelling the car along a floor to a cleaning position;
- providing at the cleaning position a first and a second cleaning belt each having an outer cleaning surface and an inner surface, and each being supported by an upper roller and a lower roller, each of the rollers having an outer surface in frictional contact with the inner surface of the associated first or second belt, the outer surface of each upper roller being near the level of the floor, the upper rollers being spaced apart to form a gap for receiving a wheel of the car;
- positioning the car with a wheel to be cleaned located in the gap and supported by the upper rollers and riding on the outer surfaces of the first and second belts;
- and
- driving one of the rollers to turn the wheel by friction between the wheel and the first cleaning belt, the turning wheel turning the second belt by friction between the wheel and the second belt,
- the outer surface of each belt being adapted to clean the wheel as the wheel turns on the belts.
Dependencies are inferred from the claim text.