Spin coating dispense arm assembly

An apparatus for spin coating liquids onto a rotating surface comprising:

• a rotatable chuck;
• a shaft attached to the chuck;
• a spin motor attached to the shaft to rotate the shaft and the chuck;
• a bowl hiving a bottom and a side defining an interior region;
• said bottom containing a opening through which said shaft is slidably disposable and said chuck is disposed within said interior region;
• a dispense arm including:
• a first dispense line including a first dispense tube located therein defining a first annular region between said first dispense tube and said first dispense line,
• a second dispense line including a second dispense tube located therein defining a second annular region between said second dispense tube said second dispense line, wherein said first and second dispense lines have adjacent outlets that are separated by a lateral distance and positionable to dispense liquid from a liquid source through said first and second dispense tubes toward said chuck in a first position, and
• a fluid channel positioned and arranged to provide flow communication between said first and second annular regions;
• a solvent line connected to a solvent source and positioned to dispense solvent between said outlets of said first and second dispense lines;
• and,
• a solvent vapor bath comprising a purge section having a top, a bottom, and a cleaning member containing two dispense holes, said member being disposed in said purge section between said top and bottom, said top containing a plurality of ports to receive said first and second dispense lines and said solvent line in a second position with said first and second dispense lines extending through said dispense holes.

An apparatus for dispensing coating liquids onto a rotating surface, comprising a dispense arm that includes:

• a first dispense line including a first dispense tube located therein defining a first annular region between said first dispense tube and said first dispense line;
• a second dispense line including a second dispense tube located therein defining a second annular region between said second dispense tube and said second dispense line, wherein said first and second dispense lines have adjacent outlets that are separated by lateral distance to dispense coating liquid onto said rotating surface in a first position;
• a fluid channel positioned and arranged to provide flow communication between said first and second annular regions;
• a solvent line connected to a solvent source and positioned to dispense solvent between said outlets of said first and second dispense line;
• and,
• a solvent vapor bath comprising a purge section having a top, a bottom, and a cleaning member containing two dispense holes, said member being disposed in said purge section between said top and bottom, said top containing a plurality of ports to receive said first and second dispense lines and said solvent line in a second position with said first and second dispense lines extending through said dispense holes.