Lift pin guidance apparatus

An apparatus for lifting a workpiece, comprising:

• a pedestal having a surface for supporting the workpiece and a plurality of lift pin bores;
• a plurality of guide pins, where each respective guide pin is attached to said pedestal and coaxially aligned with a respective lift pin bore;
• and
• a plurality of lift pins, where each of said lift pins has an interior surface and an exterior surface, wherein said interior surface slideably engages a respective guide pin and is guided by said respective guide pin through a respective lift pin bore.

An apparatus for lifting a workpiece, comprising:

• a pedestal, having a surface for supporting the workpiece and a plurality of lift pin bores;
• a plurality of guide pins, each respective guide pin being attached to said pedestal and coaxially aligned with a respective lift pin bore;
• and
• a plurality of lift pins, where each of said lift pins has an interior surface and an exterior surface, where said interior surface of each of said lift pins slideably engages a respective guide pin and is guided through a respective lift pin bore, and each of said lift pins contains a flange;
• a plurality of guide bushings, where at least one guide bushing is located in each of said lift pin bores and circumscribes said respective lift pin to form a lip seal;
• and
• an actuator, coupled to the lift pin flanges, for driving each of the lift pins along each of the guide pins and thereby extending the lift pins to engage an underside of the workpiece.