Device for compensating deformations of a part of an optomechanical or micromechanical system
AssigneeCommissariat a l'Energie Atomique
InventorsPierre Labeye, Eric Ollier
Life of this patent
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Abstract
Device for compensating deformations of a part of an optomechanical or micromechanical system. This device compensates deformations, in a first direction (z), of a mobile part (26) of an apparatus, e.g. of a micromechanical and optomechanical nature, said mobile part being displaceable in a second direction (y), and having at least one arm (50, 52) connecting on the one hand a free end of the mobile part and a fixed part (16) of the apparatus, said arm having an adequate flexibility in the second direction (y), so as not to impede the displacement of the mobile part in said second direction (y), and an adequate rigidity in the first direction (z), so as to limit the deformations of the mobile part in said first direction.
Claims33
Device for compensating deformations, in a first direction (z), of a mobile part of a micromechanical apparatus, the mobile part having a fixed end attached to a fixed part of the apparatus and a free end displaceable in a second direction (y), different from the first direction (z), said compensation device being characterized in that it has at least one arm connecting the free end of the mobile part to the fixed part of the apparatus, said at least one arm having an adequate flexibility in the second direction (y), so as not to impede the displacement of the mobile part in said second direction (y), and an adequate rigidity in the first direction (z), so as to limit the deformations of the mobile part in said first direction.
Apparatus having an optical guiding structure, with a mobile part having a fixed end attached to a fixed part of the apparatus and a free end, said apparatus also having a compensating device, for deformations in a first direction (z), of the mobile part, the mobile part being displaceable in a second direction (y), different from the first direction (z), said compensating device having at least one arm connecting the free end of the mobile part to the fixed part of the apparatus, said at least one arm having an adequate flexibility in the second direction (y), so as not to impede the displacement of the mobile part in said second direction (y), and an adequate rigidity in the first direction (z) to limit the deformations of the mobile part in said first direction.
Device for compensating deformations, in a first direction (z), of a mobile part of an apparatus having an optical guidance structure, the mobile part having a fixed end attached to a fixed part of the apparatus and a free end displaceable in a second direction (y), different from the first direction (z), said compensation device being characterized in that it has at least one arm connecting the free end of the mobile part to the fixed part of the apparatus, said at least one arm having an adequate flexibility in the second direction (y), so as not to impede the displacement of the mobile part in said second direction (y), and an adequate rigidity in the first direction (z), so as to limit the deformations of the mobile part in said first direction.
Dependencies are inferred from the claim text.