Shape measure device

A shape measuring device having a laser light source for generating flashing laser light, a lens system for shaping said laser light into a slit-shaped beam, a scanning device for deflecting said laser light shaped into said slit-shaped beam toward an object placed on a measurement plane to scan said object, and image pickup means for picking up a stripe pattern formed on said object by scanning said laser light, said shape measuring device comprising:

• driving means for generating a drive signal to drive said scanning device so that the scanning of said laser light by said scanning device over a measurement range is performed at least once in a pickup time per frame of said image pickup means;
• drive timing means for adjusting generation of the drive signal by said driving means so as to correct a nonlinear relation between said drive signal and deflection angle data indicative of an actual deflection angle of said scanning device;
• generating means for generating space code data from image data obtained by said image pickup means:
• and
• shape computing means for computing a shape of said object from the space code data and the deflection angle data.

A shape measuring device having a laser light source for generating flashing laser light, a scanning device for deflecting said laser light toward an object placed on a measurement plane to scan said object, and image pickup means for picking up image data formed on said object by scanning said laser light, said shape measuring device comprising:

• binarizing means for binarizing said image data obtained by said image pickup means;
• storing means for storing said image data binarized by said binarizing means as space code data;
• updating means for performing a logic operation between image data newly supplied from said binarizing means and image data already stored in said storing means to thereby update storage contents of said storing means;
• coordinate data generating means for generating coordinate data according to positions on a pickup plane of said image pickup means;
• and
• computing means for computing height values for the object from said space code data and said coordinate data.

A shape measuring device having a laser light source for generating flashing laser light, a scanning device for deflecting said laser light toward an object placed on a measurement plane to scan said object, and image pickup means for picking up image data formed on said object by scanning said laser light, said shape measuring device comprising:

• binarizing means for binarizing said image data obtained by said image pickup means;
• storing means for storing said image data binarized by said binarizing means as space code data;
• coordinate data generating means for generating coordinate data according to positions on a pickup plane of said image pickup means;
• converting means preliminarily storing height values corresponding to all of the space code data and all of the coordinate data;
• and
• shape computing means for reading said height values from said converting means according to said space code data and said coordinate data to thereby compute the shape of said object.